Topics
Safety
History / processes / simulation
- CMOS and Moore's law
- (semi)modern CMOS process
- MEMS process
- CyMOS
- a crude CyMOS process calculator
- cleanliness
- SUPREM tutorial
Oxidation
- Silicon dioxide
- Thermal oxidation
- Example calculations
- Oxide details
- Oxidation practice problems
- Oxidation calculator: javascript | the old Excel spreadsheet
Lithography
- Lithography & etching for 432/532
- Lithography systems
- Photoresists
- Advanced techniques
Doping
- Donor and acceptors (review from EE 230)
- Diffusion
- Diffusion details
- Diffusion example problems
- Diffusion practice problems
- Calculators: constant-source, constant-dose, two-step
- Error function table
- Conductivity (review from EE 230)
- Resistance measurements
- Resistance practice problems
- Ion Implantation
- Implant example problems
- Implant practice problems
Thin films
- Review of classical gas theory; vacuum systems; plasmas
- Surface mobility and film formation
- Evaporation
- Sputtering
- CVD
- Plasma etching
Contacts and interconnects
- Ohmic contacts to silicon
- TLM measurements | TLM practice problems
- Inter-layer connections (vias)
- Interconnects and dielectrics
- Chemical-mechanical polishing
- Copper technology
Review of device characteristics
- Diode review
- BJT review
- MOSFET review