EE 432/532 Semiconductor Fabrication G. Tuttle

Diffusion practice problems
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Read the Diffusion example calculations class notes.


Phosphorus is diffused into a silicon wafer using a constant-dose (Gaussian) process. The final profile must meet the following requirements:

The wafer has a constant background doping of NB = 4x1016 cm–3.

Design the diffusion (choose values for Q and Dt) to meet the requirements.

Also, choose a temperature and a time to give the correct Dt. (There are many possible answers. The values given below are one possible combination.)

Answer