EE 432/532 Semiconductor Fabrication G. Tuttle

van der Pauw practice problems
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Read the Resistance measurements class notes.


In a van der Pauw measurement of a piece of uniformly doped silicon, the measured resistances are:
RA = 39 Ω and RB = 65 Ω.

The silicon layer thickness is t = 1 μm.

Find the resistivity and sheet resistance of the silicon layer.

Answer