EE 432/532 Semiconductor Fabrication G. Tuttle

TLM measurement practice problems
Refresh the page to get a new problem.

Read the TLM measurement class notes.


In a TLM measurment, you have completed the resistance measurments and fit the line throught the R vs. L/W data. The equation you obtain is:

R =(75 Ω/□)·(L/W) + 30 Ω.

Find the resistance of one contact, the sheet resistance, the transfer length of the carriers traveling under the contact, and the contact resistivity.

The width of the resistors is W = 0.125 mm.

Answer