Ion Implantation practice problems
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Read the Ion implantation class notes.
Phosphorus is implanted into a silicon wafer that has a background doping of 2x1016 cm–3.
The implant energy is 70 keV, and the implant dose is 2.0e+12 cm-2. (See the notes for range and straggle plots.)
After the implant, the wafer is annealed at 950°C for 30 min.
(The Phosphorus diffusion pre-factor coefficient is Do = 4.7 cm2/s and the activation energy is EA = 3.68 eV.)
Determine the peak concentration and the junction depth(s) of the implanted profile before the anneal. The calculate the same quantities after the anneal.