EE 432/532 Semiconductor Fabrication G. Tuttle

Four-point probe practice problems
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Read the Resistance measurements class notes.


In a four-point probe measurement of a piece of uniformly doped silicon, the measured resistance is R = V/I = 47 Ω.

The silicon layer thickness is t = 6 μm and the probe spacing is s = 1.5 mm.

Find the resistivity and sheet resistance of the silicon layer.

Answer